{
  "input_sha256": "464528a971396cdec3a9ae4da1c800092f3e3035ae72f242c539a1601321cada",
  "reference_layer": "67/20",
  "reference_xy_um": [
    147.77,
    108.46
  ],
  "reference_design_nm": 170,
  "reference_measured_nm": 170.01807396233193,
  "T0": 0.3,
  "D0": 0.82421875,
  "source": "dense7",
  "pixel_um": 0.01,
  "roi_um": 2.56,
  "ambit_um": 0.32,
  "focus_um": [
    -0.2,
    0,
    0.2
  ],
  "relative_dose": [
    0.9,
    1,
    1.1
  ],
  "cd_spec_applied": false,
  "measurement": "fixed gauge; 100 nm edge-correspondence guard, not a CD specification",
  "runtime_scope": "local calculation; not Render verification",
  "display_zoom_um": 1.28,
  "optical_field_um": 3.2,
  "display_note": "Candidate close-ups show the central 1.28 um square within the 2.56 um inner ROI; 0.32 um optical margin per side is included in calculation."
}