GeoSignal

Upload a layout. Find narrow features and explore how light changes their shape.

Layout analysis

20 MB max

① GDS / OAS file

Use public, non-confidential files only.

② Layer Datatype ③ Width limit (µm) Space limit (µm) ④ ROI size (µm) Pixel size (µm)

Candidate count · per type

Illumination: dense7 · Default reference: TT04 PWM 67/20

⑤ Compare Focus / Dose

⑥ Override reference · optional

Default: TT04 PWM · layer 67/20 · anchor X=147.770 µm, Y=108.460 µm · design width 170 nm · vertical measurement.

Center X (µm)Center Y (µm) Design width (µm)Measurement direction

Leave these fields blank to use the TT04 reference for any file/layer. Fill them to fit a different design reference. This is not measured-wafer calibration.

The free server may take time to start and analyze.

Analyzing your layout…

How to read the results ↗

Layout hotspots

Saved example

Interactive UI draft · TT04 PWM 67/20. Upload and new analysis are disabled.

⑦ Candidate locations

Geometry screening across the layout. Candidate count limits detailed review, not detection.

⑧ Main candidates

Saved close-ups: 1.28 × 1.28 µm zoom · calculation ROI 2.56 × 2.56 µm · margin 0.32 µm per side. Select a pattern below. Mask + aerial image; white: nominal contour, cyan/lime: dose −/+10%.

⑨ Focus / Dose details · optional

Nine combinations for this candidate only. Saved results are available for candidate #1 in each type.

Reference & downloads

TT04 PWM 67/20 · (147.770, 108.460) µm · design width 170 nm. Shared design reference, not wafer calibration.

T0 = 0.3 · D0 = 0.82421875 · Tnorm = 0.36398104

Measurements CSV