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Demo

Upload a layout, find narrow features, and inspect the patterns that deserve a closer look.

Start with locations and patterns. GeoSignal screens the selected GDS layer for narrow widths and gaps, then calculates optical images for a limited set of candidates. Focus / Dose comparison is an optional next step.

1. Screen guide

The proposed screen below starts with a layout overview and six candidates per type by default. Choose 4, 6 or 8, switch between Width and Space, and click a pattern to see it at full width below. Candidate count controls detailed review; it does not limit geometry detection.

This is an interactive, saved-data preview, not a live analysis session. Six examples per type are available. Actual PW data is available for Width #1 and Space #1; the other cards show an uncalculated state. Choosing 8 does not invent additional examples. The deployed app may still show the previous interface.

Open the interactive screen ↗

Using the live demo

The screen above previews the updated workflow. In the currently deployed app, files outside the registered examples may still require an explicit reference location, direction and design width. Follow the reference fields shown in that app.

Usually, leave Override reference blank. These examples share the TT04 PWM 67/20 anchor at (147.770, 108.460) µm, fitted to its 170 nm design width. This is a common comparison baseline, not calibration to measured wafers. Other patterns are not individually fitted.

2. Find the main candidates

The overview locates candidates across TT04 PWM 67/20. Markers identify places to inspect, not confirmed manufacturing defects.

Narrower geometry comes first; ties prefer larger candidate regions. The galleries below show six Width and six Space examples. Warm colors show light intensity; cyan, white and lime contours represent dose −10%, nominal and +10%.

Image scale: Candidate close-ups (including nominal and 3×3 images) show a 1.28 × 1.28 µm zoom inside a 2.56 × 2.56 µm calculation ROI. The calculation also includes a 0.32 µm optical margin on each side. Zooming changes only the displayed area, not the calculation conditions. The layout overview shows the full layer.

Width · top 6

Space · top 6

3. Actual examples: 67/20 and 68/20

These are actual local calculations on the public TT04 PWM GDS, using the same 67/20 reference. Each example keeps its candidate and measurement location fixed. They are not Render runtime tests or a ranking of entire layers.

Start with the nominal pattern pair. Open the optional comparison to see nine conditions and the corresponding Bossung curves.

The examples below use the same 1.28 µm zoom and 2.56 µm calculation ROI.

TT04 PWM 67/20

The geometry and model measurements differ because the common reference is not fitted separately to these candidates.

TT04 PWM 68/20

The selected width candidate has a narrow neck. Its nominal model width is about 88 nm versus 140 nm in the geometry. At dose 0.90 and focus ±0.20 µm, the fixed-gauge measurement reports a missing feature. This is a local model response, not a wafer-defect claim.

4. Read the results

Look for a narrowing neck, a closing gap, rounded corners or a line end pulling back. The orange cross marks the measurement location. In the 3×3 images, cyan marks the calculated contour and Δ shows the change from that candidate’s nominal result. Brightness is held consistent within each comparison.

The model treats polygons as illuminated regions. These contours do not determine which material remains after resist development or etch. They are relative model results for study, not calibrated process predictions.

5. Data and details

• Measurements CSV
• Reference and conditions
• 67/20 review GDS
• v0.10 evaluation and technical details

The review GDS is the saved 67/20 example; it does not include the 68/20 comparison. Upload only public, non-confidential layouts.