v0.8 Release Notes

Main Focus

v0.8 extends the fixed-ROI optical review from a single normalized condition to a physical focus/dose process-window workflow. The existing fast preview remains available, while an optional sweep evaluates one fixed candidate over bounded focus and relative-dose grids.

Focus and Dose Model

The scalar, aberration-free Abbe pupil now accepts wafer-side focus_um and propagates the corresponding defocus phase. Dose remains a resist-side threshold operation:

effective threshold = nominal threshold / relative dose

The raw aerial image is therefore not rescaled for each dose. The process-window path uses clear-field-relative intensity, while the legacy single-condition preview keeps its display-oriented peak normalization. This separation avoids mixing a visualization convention with physical sweep measurements.

Process-Window Analysis

The optional workflow adds:

fixed-candidate focus/dose sweeps
dose-to-size calibration at best focus
explicit no-contour and topology-failure states
sampled depth-of-focus and exposure-latitude summaries
common process-window counts
Bossung and process-window plots
CSV and JSON result artifacts
bounded UI controls for focus, dose, and candidate condition counts

Mask FFT and source-independent context are reused across focus conditions. The process-window path defaults to dense11 source quadrature; the fast single-condition preview remains on dense7.

Validation

The implementation added checks for focus-sign symmetry, through-focus clear-field conservation, inverse-dose threshold behavior, topology failures, common-PW summaries, and service integration. All 47 automated tests passed at the v0.8 implementation milestone.

Interpretation Limits